Patent · US Expired

Developer producing equipment and method

US6623183B2 · kind B2 · utility

10Cited by
9References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 6, 2002
Grant dateSep 23, 2003
Priority date
Expiry dateFeb 6, 2022

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/0329
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The developer producing equipment of the present invention is connected via piping to working equipment in which electronic circuits, on which fine working is performed, are formed, and produces an alkali type developer used in the abovementioned working equipment. This developer producing equipment comprises a preparation tank to which a developer stock solution and pure water are supplied, and in which these are agitated, first liquid amount measuring means for measuring the amount of the alkali type developer inside the preparation tank, first alkali concentration measuring means for measuring the alkali concentration of the abovementioned alkali type developer, first liquid amount control means for adjusting the amount of the alkali type developer inside the preparation tank on the basis of the measured value obtained by the abovementioned first liquid amount measuring means the abovementioned first alkali concentration measuring means, and liquid supply control means.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.