Lead zirconate titanate dielectric thin film composites on metallic foils
US6623865B1 · kind B1 · utility
15Cited by
32References
23Claims
0Family size
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Key dates
| Filing date | Mar 4, 2000 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Mar 4, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B3/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Crystalline dielectric lead zirconate titanate thin film composites on metallic foils exhibit high dielectric constants, low dielectric loss (loss tangent of less than 5%) and low leakage current. The lead zirconate titanates may be of the formula PbZrxTiyOz (PZT) wherein x and y are independently from about 0.35 to about 0.65 and z is from about 2.5 to about 5.0. The thin foil dielectric composites can be prepared by a variety of methods including deposition of PZT thin films on brass, platinum, titanium, and stainless steel foils using sol-gel processing, sputtering deposition and chemical vapor deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.