Liquid crystal display device, matrix array substrate, and method for manufacturing matrix array substrate
US6624864B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 19, 1999 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Apr 19, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/136231
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An object of the present invention is to simplify steps for manufacturing a matrix array substrate by reducing the number of masks being necessary to manufacture and to improve yield ratio of the matrix array substrate. According to the present invention, on a glass substrate, scanning lines, signal lines, a first insulated film, a second insulated film, an unprocessed semiconductor film, an unprocessed channel protective film, unprocessed low resistance semiconductor film, and Mo/Al/Mo laminated film are formed. Then, the source electrodes, the drain electrodes, the signal lines, a semiconductor film, and a low resistance semiconductor film are formed at a time by patterning using a common mask pattern. Display pixel electrodes cover upper surfaces of the source electrodes, the drain electrodes, the semiconductor film, the scanning line pads, and the signal line pads. Edge lines of the source electrodes, the low resistance semiconductor film, and the semiconductor film are aligned, and edge lines of the drain electrodes, the low resistance semiconductor film and the semiconductor film are aligned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.