Surface inspection tool

US6624884B1 · kind B1 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Wayne Isami Imaino · San Jose, US
• Anthony Juliana, Jr. · San Jose, US
• Milton Russell Latta · San Jose, US
• Charles H. Lee · Kannapolis, US
• Wai Cheung Leung · San Jose, US
• Hal J. Rosen · Los Gatos, US
• Steven W. Meeks · Fremont, US
• Richard Sonningfeld · San Jose, US

Key dates

• Filing date: Apr 28, 1997
• Grant date: Sep 23, 2003
• Expiry date: Apr 28, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/88
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.