Interferometric-based external measurement system and method
US6624891B2 · kind B2 · utility
49Cited by
7References
9Claims
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Key dates
| Filing date | Oct 12, 2001 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Nov 20, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric-based measurement system for externally measuring a distance between a pair of reference surfaces on an object, including: a low coherence light interferometer; an object mounting apparatus including an optical probe having an optical probe chuck; an optical fiber cable for coupling light from the interferometer to the optical probe chuck; and a computer for processing data collected by the interferometer, wherein the data is used to determine the distance between the pair of reference surfaces on the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.