Systems and methods for overcoming stiction using a lever
US6625342B2 · kind B2 · utility
57Cited by
20References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2001 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Mar 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3598
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.