Patent · US Expired

Micro-mechanical waveguide optical devices

US6625356B2 · kind B2 · utility

19Cited by
9References
46Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2001
Grant dateSep 23, 2003
Priority date
Expiry dateApr 12, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2006/12145
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Optical devices and methods for attenuating, shuttering, or switching optical signals as found in telecommunications. A platform carrying a portion of a waveguide and residing in a plane of a substrate is tipped, tilted, twisted, or otherwise moved out of the plane of the substrate to divert the path of an optical signal or to change coupling between adjacent waveguides. The platform can be formed by etching a substrate while leaving one or more connection points between the platform and the substrate to hold the platform to the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.