Method for fabricating fiducials for passive alignment of opto-electronic devices

US6625357B2 · kind B2 · utility

Assignee

• Tyco Electronics Co., Ltd · US

Inventors

• Terry Patrick Bowen · Dillsburg, US
• William Ring · New York, US
• Ching-Long Jiang · Montgomery, US
• Randall B. Wilson · Fryeburg, US
• Mark S. Soler · Whippany, US
• John Baker Breedis · Boston, US
• Richard Anderson · Oakland, US

Key dates

• Filing date: Oct 18, 2001
• Grant date: Sep 23, 2003
• Expiry date: Nov 12, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S2304/04
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present invention relates to a technique for fabricating a mechanical or visual alignment fiducial on a laser die particularly adapted for application with a laser die that is a buried structure edge emitting laser. In fabricating the device, the fiducial and the active mesa are formed in the same photolithography patterning step, using conventional techniques. The active is then buried with regrowth layers. The regrowth layers are subsequently selectively etched to expose the fiducial, leaving the active region protected and buried.