Laser-driven cleaning using reactive gases
US6627846B1 · kind B1 · utility
10Cited by
11References
11Claims
0Family size
Assignee
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Key dates
| Filing date | May 4, 2000 |
| Grant date | Sep 30, 2003 |
| Priority date | — |
| Expiry date | May 4, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67069
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for removing contaminants from the surface of a substrate. An explosive medium is introduced into a vicinity of the substrate, and a beam of electromagnetic energy is directed toward the substrate. Absorption of the electromagnetic energy causes the explosive medium both to generate a blast wave and to form reactive species, the blast wave and the reactive species cooperating to remove the contaminants from the surface substantially without damage to the surface itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.