Fluid pressure bearing

US6629778B1 · kind B1 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Eckhard Enderle · Aalen, DE
• Dieter Kaufmann · Heidenheim, DE

Key dates

• Filing date: Aug 23, 2000
• Grant date: Oct 7, 2003
• Expiry date: Aug 23, 2020

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16C32/06
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A bearing arrangement has fluid pressure bearings which permit an especially stiff support and is therefore especially well suited for high precision machines such as coordinate measuring apparatus. The bearing arrangement includes at least two fluid pressure bearings (12, 13, 14, 15, 16, 17) having a membrane formed as a support end. The membrane is concavely deformed by the bearing pressure. The bearing arrangement also includes a rigidly configured bearing base body which is supported on the two fluid pressure bearings. The rigid support is achieved in that at least one of the fluid pressure bearings includes a bearing housing (12a, 12b; 13a, 13b; 14a, 14b) which is configured as one piece and in that the bearing base body (6) is operatively connected directly to the bearing housing (12a, 12b; 13a, 13b; 14a, 14b). The bearing housing includes at least the membrane.