Method and apparatus for circulating pallets in an elevator unit of the module IC handler
US6629812B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 1999 |
| Grant date | Oct 7, 2003 |
| Priority date | — |
| Expiry date | Dec 6, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A module IC handler used for testing module Ics is disclosed in which the handler enables loading and unloading operations for module ICs, without further elevating pallet over an installation plate, and provides sequential transferring operations for the pallet on which test or customer tray is placed. To this end, after all module Ics 1 are loaded from the test tray 6 exposed to the loading or unloading position 19 or 26 by the loading and unloading elevator units 18a, 18b, or the test-finished module Ics are filled in the customer tray 17, the pallet 5 is moved to a rotation position 30 by a transfer 31, and then can be circulated to an upper side of the loading or unloading elevation plate 36 by the downer 32.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.