Method and system for electrically controlling the spacing between micromechanical electrodes
US6630657B1 · kind B1 · utility
2Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2000 |
| Grant date | Oct 7, 2003 |
| Priority date | — |
| Expiry date | Dec 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method for controlling by electrical means the interelectrode distance of such a micromechanical electrode structure [(7,8)] in which at least one electrode [(7)] is attached elastically suspended on the surrounding structure, whereby the elastic properties of each electrode and the electrical control applied over the electrodes determine the interelectrode distance. According to the invention, the distance between the electrodes [(7,8)] is controlled by controlling the AC control current passing via the electrodes [(7,8)].
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.