Microfluidic flow sensing method and apparatus
US6631648B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2001 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Aug 28, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB33Y80/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensing of microfluidic flow is carried out by confining and directing a fluid along a surface in a primary direction of flow past a cantilever beam which is mounted at one end of the beam to the surface. The cantilever beam has opposite beam surfaces that are oriented at an angle off parallel to the primary direction of flow of the fluid. As the fluid is directed past the beam at a rate such that the drag forces imposed by the fluid on the opposite surfaces of the beam are greater than the inertial forces of the fluid on the beam, a differential force is applied to the beam that tends to pivot the beam about its mount to the surface or bend the beam or both. The deflection of the beam in response to the differential drag forces may be detected to determine the rate of flow of the fluid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.