Patent · US Expired

Thermal actuator with optimized heater length

US6631979B2 · kind B2 · utility

39Cited by
15References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 17, 2002
Grant dateOct 14, 2003
Priority date
Expiry dateJan 17, 2022

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB41J2/14427
  • WIPO fieldTextile and paper machines
  • WIPO sectorMechanical engineering

Abstract

An apparatus for a thermal actuator for a micromechanical device, especially a liquid drop emitter is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element extending from the base element a length L and normally residing at a first position before activation. The cantilevered element includes a layer constructed of an electrically resistive material, patterned to have a uniform resistor portion extending a length L, from the base element, wherein 0.3L≦LH≦0.7L. The cantilevered element includes a second layer constructed of a dielectric material having a low coefficient of thermal expansion attached to the first layer. A pair of electrodes connected to the uniform resistor portion to apply an electrical pulse to cause resistive heating, resulting in a thermal expansion of the uniform resistor portion of the first layer relative to the second layer and deflection of the cantilevered element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.