Thermal actuator with optimized heater length
US6631979B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2002 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Jan 17, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/14427
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An apparatus for a thermal actuator for a micromechanical device, especially a liquid drop emitter is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element extending from the base element a length L and normally residing at a first position before activation. The cantilevered element includes a layer constructed of an electrically resistive material, patterned to have a uniform resistor portion extending a length L, from the base element, wherein 0.3L≦LH≦0.7L. The cantilevered element includes a second layer constructed of a dielectric material having a low coefficient of thermal expansion attached to the first layer. A pair of electrodes connected to the uniform resistor portion to apply an electrical pulse to cause resistive heating, resulting in a thermal expansion of the uniform resistor portion of the first layer relative to the second layer and deflection of the cantilevered element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.