Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
US6632698B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 7, 2001 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Dec 29, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical device (MEMD) defined within a substrate of a MEMS includes a mass element defining an area of interest. The device also includes a support beam supporting the mass element in spaced-apart relationship from the substrate. The support beam includes a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element. The support beam further includes a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element. The beam members are in spaced-apart relationship from one another. A first cross member connects the first beam member and the second beam member. Preferably, the support beam includes a plurality of cross members. Two such support beams can be used to support a mass element in a MEMD in a bridge configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.