Optical-electrical MEMS devices and method
US6633426B2 · kind B2 · utility
10Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2001 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Sep 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A novel optical-electrical MEMS device overlaid or covered with an optically transmissive substrate held spaced in inverted preferably flip-chip bonded fashion to the device, with transparent electrodes provided in the substrate for generating an upper mirror-actuating field to supplemental the customary lower mirror-well field, enabling complementary operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.