Temperature control of micro-mirrors of an optical switch substrate
US6633693B1 · kind B1 · utility
20Cited by
8References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2001 |
| Grant date | Oct 14, 2003 |
| Priority date | — |
| Expiry date | Apr 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3556
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A temperature control system is provided for an optical switch including steerable micro-mirrors. The system includes at least one sensor and associated sensing circuitry for measuring the temperature of a micro-mirror or a region of a substrate near a micro-mirror. The system also includes a controller that responds to a signal provided by the sensing circuitry. The controller response may include activating heating or cooling devices the region that is sensed to adjust the temperature of the region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.