Patent · US Expired

High temperature sensor

US6634212B2 · kind B2 · utility

4Cited by

9References

5Claims

0Family size

Assignee

Daimlerchrysler AG · US

Inventors

Ralf Moos · Friedrichshafen, DE
Thomas Birkhofer · Immenstadt im Allgäu, DE
Werner Maunz · Markdorf, DE
Ralf Müller · Geringswalde, DE
Willi Muller
Carsten Plog · Markdorf, DE

Key dates

Filing date	Jun 29, 2001
Grant date	Oct 21, 2003
Priority date	—
Expiry date	Jul 25, 2021

Classification

Technology area (CPC G)Physics
CPC primaryG01N2027/222
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

High temperature substance sensor, includinga substrate (4),a device (6) for raising and maintaining the temperature of the sensor, anda layer like capacitor structure (38) with structure sizes smaller than 50 &mgr;m, upon which a functional layer (18) is applied.In accordance with the invention the layer-like capacitor structure (38) is produced by the following:application of a complete or already pre-structured electrically conductive layer as precursor of the capacitor structure (38) using a thick layer technique,structuring the electrically conductive layer using a photolithographic structuring process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.