Acceleration sensor with limited movability in the vertical direction

US6634232B1 · kind B1 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rasmus Rettig · Gerlingen, DE
• Oliver Kohn · Reutlingen, DE
• Frank Fischer · Mesa, US
• Dietrich Schubert · Reutlingen, DE

Key dates

• Filing date: Sep 19, 2002
• Grant date: Oct 21, 2003
• Expiry date: Sep 19, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention relates to an acceleration sensor including an oscillating structure which is movably suspended on a substrate and deflectable in response to the action of an acceleration, a plane of oscillation of the oscillating structure being essentially parallel to a substrate plane, and further including evaluation arrangements for measuring a deflection of the oscillating structure due to acceleration. In this context, provision is made for stop arrangements which limit a deflection movement of the oscillating structure in a direction essentially perpendicular to the plane of oscillation (x-, y-plane) of the oscillating structure.