High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications
US6635919B1 · kind B1 · utility
133Cited by
1References
14Claims
0Family size
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Key dates
| Filing date | Aug 17, 2000 |
| Grant date | Oct 21, 2003 |
| Priority date | — |
| Expiry date | Aug 17, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/16
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A Micro Electro-Mechanical System (MEMS) varactor (100, 200) having a bottom electrode (116) formed over a substrate (112) and a dielectric material (130) disposed over the bottom electrode (116). A pull-down electrode (122) is formed over spacer (120) and the dielectric material (130). The MEMS varactor (100, 200) is adapted to operate in a stiction mode, with at least a portion of pull-down electrode (122) in contact with dielectric material (130). The MEMS varactor (100, 200) has a high Q, large tuning range, and high sensitivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.