Process for controlling a laser scanning microscope with a tiltable fine focusing stage

US6636351B2 · kind B2 · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Thomas Weyh · Munich, DE
• Ulrich Simon · Kahla, DE
• Sebastian Tille · Marburg, DE

Key dates

• Filing date: Mar 22, 1999
• Grant date: Oct 21, 2003
• Expiry date: Mar 22, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/242
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A process for displaying three-dimensional point distributions in a laser scanning microscope with a tiltable fine focusing stage, wherein an actual scanned first raster point distribution is compared with a computer-generated second raster point distribution, and the first raster points are utilized for display in the second raster point distribution when the raster points in both distributions correspond with one another, while intermediate values are formed from points of the first raster point distribution lying in the vicinity of second raster points when there is no correspondence, wherein the position of these intermediate values corresponds to the position of the second raster points, or a displacement of the X/Y-scanner of the microscope and/or of the stage tilting means is carried out in a particularly advantageous manner with reference to a computer-determined two- or three-dimensional raster point distribution in such a way that the scanned raster points in and/or on an object correspond completely or partially to a predetermined, preferably stored raster point distribution. A tiltable fine focusing stage is also disclosed.