MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same
US6636655B2 · kind B2 · utility
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21References
31Claims
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Key dates
| Filing date | Aug 24, 2001 |
| Grant date | Oct 21, 2003 |
| Priority date | — |
| Expiry date | Nov 8, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3582
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
MEMS optical switches can include a substrate having first and second opposing faces and at least one side therebetween. An input is obliquely angled towards the face and optically couples optical radiation towards the face. A movable reflector is on the face and moves from a first position to a second position that is parallel to the first position to reflect the optical radiation from the input to provide reflected optical radiation. A output is obliquely angled away from the face and optically couples the reflected optical radiation away from the face.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.