Method for improving the performance of micromachined devices
US6636819B1 · kind B1 · utility
6Cited by
41References
5Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 5, 2000 |
| Grant date | Oct 21, 2003 |
| Priority date | — |
| Expiry date | Nov 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for improving the performance of a micromachined device, preferably an angular rate microsensor, is provided. The method includes collecting data on rate bias over a selected operating phase demodulation angles for at least one tine of a microsensor and determining optimum settings for phase demodulation angles at which the rate bias hysteresis over temperature is at a minimum by applying dynamic programming.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.