Microelectromechanical RF switch
US6639494B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 18, 2002 |
| Grant date | Oct 28, 2003 |
| Priority date | — |
| Expiry date | Dec 18, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS switch with a bridge having three symmetric arms each having one end connected to a support arrangement and another end integral with a common central bridge portion. First and second conductors are deposited on a substrate, with the first conductor having an end with an open area which encompasses a pull down electrode which is also on the substrate, and of a height less than that of the conductor. A control voltage applied to the pull down electrode causes downward movement of the bridge, to present a relatively low impedance, thereby allowing a signal to propagate between the first and second conductors, without the bridge touching the pull down electrode. Each of the arms is slotted to reduce curl-induced stiffness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.