Patent · US Expired

Methods and apparatus for polarized reflectance spectroscopy

US6639674B2 · kind B2 · utility

51Cited by
11References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 28, 2001
Grant dateOct 28, 2003
Priority date
Expiry dateApr 2, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/21
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods and apparatus for assessing the size of a scattering element of a sample. Primary radiation is generated from a source. The primary radiation is polarized to produce polarized primary radiation. The polarized primary radiation is directed to the sample to generate reflected radiation. The reflected radiation is directed through a polarizer to produce filtered reflected radiation, the polarizer being configured to select reflected radiation parallel and perpendicular to the polarization of the polarized primary radiation. The filtered radiation is detected, and a depolarization ratio is calculated using the detected filtered radiation. The size of the scattering element is calculated using the depolarization ratio.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.