Silicon micromachined optical device
US6639713B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2001 |
| Grant date | Oct 28, 2003 |
| Priority date | — |
| Expiry date | Apr 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.