Method for producing surface acoustic wave sensors and such a surface acoustic wave sensor

US6640613B2 · kind B2 · utility

Assignee

• Forschungszentrum Karlsruhe GmbH · DE

Inventors

• Michael Rapp · Seeheim-Jugenheim, DE
• Ullrich Stahl · Karlsruhe, DE

Key dates

• Filing date: Apr 1, 2002
• Grant date: Nov 4, 2003
• Expiry date: Apr 1, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/0423
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a method for producing surface wave sensors on the basis of a surface wave building component a polymer parylene film with a thickness of 20 to 200 nm is applied to a hydrophilic sensor surface of the surface wave building component by deposition from the gas phase, whereby the hydrophilic sensor surface becomes hydrophobic, the surface is then subjected to plasma activation to render it hydrophilic and a hydrophilic sorption polymer layer is then applied to the parylene film so as to provide a surface wave sensor with a homogenous sorption polymer layer.