Differential pressure sensor

US6640640B2 · kind B2 · utility

Assignee

• ABB PATENT GMBH · DE

Inventors

• Wolfgang Scholz · Minden, DE
• Albrecht Vogel · Oberkochen, DE
• Peter Krippner · Karlsruhe, DE

Key dates

• Filing date: Jun 14, 2002
• Grant date: Nov 4, 2003
• Expiry date: Jun 14, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L13/026
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A differential pressure sensor has a first and a second measuring chamber. Each measuring chamber is limited by a rigid carrier plate and a diaphragm plate, which is formed in the region of the measuring chamber as a pressure-sensitive measuring diaphragm. To design the differential pressure sensor to be resistant to overloading, the carrier plate is arranged between a first and a second diaphragm plate and has congruent concave depressions on opposite sides in the plane of the plate. The depressions are connected to one another by a central duct, penetrating the carrier plate perpendicularly to the plane of the plates. In the region of the measuring chambers, the diaphragm plates are formed congruently in relation to the depressions as pressure-sensitive measuring diaphragms. The measuring chambers are coupled to one another by a ram guided axially movably in the duct.