Parallel, individually addressable probes for nanolithography

US6642129B2 · kind B2 · utility

Assignee

• The Board of Trustees of the University of Illinois · US

Inventors

• Chang Liu · Champaign, US
• Ming Zhang · Beijing, CN
• David Bullen · Ottawa, CA

Key dates

• Filing date: Dec 7, 2001
• Grant date: Nov 4, 2003
• Expiry date: Dec 7, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/874
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.