Filler for crosslinkable elastomer and crosslinkable elastomer composition containing the same
US6642300B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2001 |
| Grant date | Nov 4, 2003 |
| Priority date | — |
| Expiry date | Oct 23, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08L79/08
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
To provide the filler which is added to a composition for a sealing member, etc. for sealing of semi-conductor production equipment being apt to be damaged greatly by mixing of a foreign matter and is small in a change in weight in either of the oxygen plasma irradiation and CF4 plasma irradiation, and the crosslinkable elastomer composition. The filler is used for the crosslinkable elastomer and has an imide structure, and a change in weight of the filler is not more than 4 mg/cm2·hr in either of the oxygen plasma irradiation and CF4 plasma irradiation. The crosslinkable elastomer composition comprises the filler and the crosslinkable elastomer such as a fluorine-containing elastomer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.