Patent · US Expired

Glass ceramic plates for holding substrates during pre-heating

US6642484B2 · kind B2 · utility

2Cited by

2References

4Claims

0Family size

Assignee

Schott Glas · DE

Inventors

Hartmut Eggert · Ober-Olm, DE
Armin Kunkel · Bingen, DE
Juergen Vogt · Eindhoven, NL
Rolf Meyer · Wennigsen (Deister), DE
Peter Woerner · Saulheim, DE

Key dates

Filing date	Oct 4, 2002
Grant date	Nov 4, 2003
Priority date	—
Expiry date	Oct 4, 2022

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/46
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

In the method for coating substrates the substrates are placed in recesses in a glass-ceramic plate or plates arranged over infrared high-temperature radiators with the surfaces to be coated on the radiators. The substrates are heated from below to the process temperature required for the coating. Subsequently the substrates are removed from the heating device, introduced into a coating chamber and coated. The preheating device for the substrates has two glass-ceramic plates that are placed loosely on top of each other and infrared high-temperature radiators. Substrate receptacles are provided in the glass-ceramic plates by approximately coincident recesses of different size in the plates so that the substrates can be held in close proximately to the radiators during the preheating.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.