Line sensing device for ultrafast laser acoustic inspection using adaptive optics
US6643005B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2002 |
| Grant date | Nov 4, 2003 |
| Priority date | — |
| Expiry date | Jun 12, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and method for inspecting thin film specimens along a line. A laser emits pulses of light that are split into first, second, third and fourth portions. A delay is introduced into the first portion of pulses and the first portion of pulses is directed onto a thin film specimen along a line. The third portion of pulses is directed onto the thin film specimen along the line. A delay is introduced into the fourth portion of pulses and the delayed fourth portion of pulses are directed to a photorefractive crystal. Pulses of light reflected from the thin film specimen are directed to the photorefractive crystal. Light from the photorefractive crystal is collected and transmitted to a linear photodiode array allowing inspection of the thin film specimens along a line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.