Optical system for oblique incidence interferometer and apparatus using the same
US6643026B2 · kind B2 · utility
2Cited by
3References
14Claims
0Family size
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Key dates
| Filing date | Feb 9, 2001 |
| Grant date | Nov 4, 2003 |
| Priority date | — |
| Expiry date | Jan 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an optical system for an oblique incidence interferometer, first and second prisms are used for luminous flux dividing and for luminous flux combining, respectively. Reference light and measurement light are separated from each other at a surface where collimated coherent light enters or exits from the first prism, whereas the reference light and measurement light are combined together at a surface where the measurement light enters or exits from the second prism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.