Optical scanner
US6643045B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 10, 2001 |
| Grant date | Nov 4, 2003 |
| Priority date | — |
| Expiry date | Jan 19, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A semiconductor scanner substrate includes a vibrating structure of a mirror supported by a beam projecting from a frame. Strain sensing piezoresistors are formed in a base region of the beam adjacent to the frame. Metal interconnections are formed in the frame to connect the piezoresistors in a bridge circuit for sensing bending deformation or in a bridge circuit for sensing twisting deformation. Two of the piezoresistors extend alongside the lateral edges of the beam in the longitudinal direction of the beam, and these resistors are connected as adjacent arms in the bridge circuit for sensing the twisting deformation accurately.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.