Patent · US Expired

Piezoelectric/electrostrictive device and method of manufacturing same

US6643902B2 · kind B2 · utility

23Cited by
15References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 4, 2002
Grant dateNov 11, 2003
Priority date
Expiry dateJan 4, 2022

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49789

Abstract

A method of manufacturing a piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.