Patent · US Expired

Pressure sensor device

US6643976B2 · kind B2 · utility

2Cited by

2References

3Claims

0Family size

Assignee

First Sensor Technology GmbH · DE

Inventors

Johannes Ante · Regensburg, DE
Christian Geiger · Teisendorf, DE
Markus Gilch · Moosburg an der Isar, DE
Hans-Peter Landgraf · Obermöllrich, DE
Andreas Ott · Erfurt, DE

Key dates

Filing date	Mar 26, 2002
Grant date	Nov 11, 2003
Priority date	—
Expiry date	Mar 26, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0055
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor device is described that has a diaphragm acted upon by a working medium, on a first side, and a sensor chip, which is disposed on a second side of the diaphragm that is remote from the working medium. There is formed in the sensor chip a measuring bridge having four sensor elements, which form two pairs disposed parallel, and the pairs are disposed at right angles to one another. The sensor elements are disposed such that they are closely spaced apart from one another in the edge region of the sensor chip that faces toward the central point of the diaphragm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.