Turbo molecular pump
US6644938B2 · kind B2 · utility
10Cited by
6References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 18, 2002 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Mar 18, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a turbo molecular pump capable of suppressing temperature rise in an electronic circuit section within a range, without losing airtight property thereof with a simple construction. In a base section of a turbo molecular pump, a bottom portion thereof is sealed by a bottom cover. A semiconductor device is disposed at the inner portion of the bottom cover. A cooling member is provided, which is used for releasing heat of the semiconductor device in an airtight state outside the bottom cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.