Susceptors for semiconductor-producing apparatuses
US6645304B2 · kind B2 · utility
524Cited by
8References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 16, 2001 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Oct 16, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68757
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A susceptor made of a ceramic material for placing and heating an object to be processed, on a placing face thereof in a semiconductor-producing apparatus, includes a surface layer having the placing face, and a supporting layer integrated with the surface layer. The volume resistivity of the surface layer is lower than that of the supporting layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.