Epitaxial oxide films via nitride conversion
US6645639B1 · kind B1 · utility
8Cited by
8References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2001 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Aug 16, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B33/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to oxides on suitable substrates, as converted from nitride precursors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.