Pulsed laser deposition of transparent conducting thin films on flexible substrates

US6645843B2 · kind B2 · utility

Assignee

• United States of America as represented by the Secretary of the Air Force · US

Inventors

• Heungsoo Kim · Fairfax, US
• James Horwitz · Fairfax, US
• Zakya H. Kafafi · Alexandria, US
• Alberto Pique · Crofton, US
• Gary P. Kushto · Crofton, US

Key dates

• Filing date: Jan 19, 2001
• Grant date: Nov 11, 2003
• Expiry date: Jan 19, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E10/50

Abstract

The invention relates to the deposition of transparent conducting thin films, such as transparent conducting oxides (TCO) such as tin doped indium oxide (ITO) and aluminum doped zinc oxide (AZO) on flexible substrates by pulsed laser deposition. The coated substrates are used to construct low cost, lightweight, flexible displays based on organic light emitting diodes (OLEDs).