Patent · US Expired

Gas inlet for an ion source

US6646253B1 · kind B1 · utility

100Cited by

9References

5Claims

0Family size

Assignee

GSF-Forshungszentrum für Umwelt und Gesundheit, GmbH · DE

Inventors

Egmont Rohwer
Ralf Zimmermann · Bensberg, DE
Hans Heger · Munich, DE
Ralf Dorfner · Munich, DE
Ulrich Boesl · Landshut, DE
Antonius Kettrup · Bad Staffelstein, DE

Key dates

Filing date	Nov 17, 2000
Grant date	Nov 11, 2003
Priority date	—
Expiry date	May 24, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH01J49/0468
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In a gas inlet structure for an ion source, including a capillary for the admission of a sample gas, which capillary is disposed in a guide tube for discharging a sample gas into the guide tube, the guide tube has an open end disposed in the ion source. The guide tube includes a valve for the pulsed admission of a carrier gas to the guide tube. The guide tube, the valve and the capillary are supported in a sealed support housing from which the guide tube with the capillary disposed therein projects into the ion source for supplying thereto the sample gas in a pulsed manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.