MEMS optical switch actuator
US6647171B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2000 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | May 16, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3596
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) optical switch actuator and method for fabricating the actuator provide an anchor assembly that functions as a second electrode. The actuator has a reflective element assembly and a first electrode assembly for moving the reflective element assembly from a first position to a second position based on a switching signal. The actuator further includes an anchor assembly coupled to the reflective element assembly such that a spring force is generated in the reflective element assembly when the reflective element assembly is in the second position. The anchor assembly is electrically conductive such that the switching signal generates an electrostatic force between the anchor assembly and the first electrode assembly. The method for fabricating the actuator includes the step of coupling a multi-level reflection assembly to an optical circuit. The reflection assembly has an electrically conductive anchor assembly positioned at a first level with respect to the optical circuit and a mirror positioned at a second level with respect to the optical circuit. An insulative mirror beam layer is then coupled to the reflection assembly, and an electrode a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.