Imaging technique for use with optical MEMS devices
US6647172B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 29, 2001 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Sep 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3556
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Using an imaging system, an optical MEMS devices is imaged so that in combination with an actual one or more other optical MEMS devices, or images thereof, a single virtual optical MEMS device is formed that has the size of each of the optical MEMS devices combined. The physical size of the arrangement may be reduced by compacting the optical path, e.g., using appropriate conventional mirrors, and/or employing folded arrangements, i.e., arrangements in which there is only one MEMS device stage that does double duty for both input and output through the use of at least one conventional mirror. The imaging system may reproduce the angle of reflection of the light from the micro mirror, e.g., using a telecentric system. A prism may be employed to align the various optical MEMS devices, or images thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.