Coupler array to measure conductor layer misalignment
US6647311B1 · kind B1 · utility
6Cited by
15References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 18, 1999 |
| Grant date | Nov 11, 2003 |
| Priority date | — |
| Expiry date | Nov 18, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/975
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Systems and methods are presented for employing arrays of coupling strips to measure misalignment of layers of multilayer devices as a function of directional coupling between pairs of strips. Each array is capable of detecting misalignment only in the direction perpendicular to the axes of the coupling strips, although multiple arrays may be employed for measuring misalignment in more than one direction. Such arrays are easily manufactured onto existing multilayer devices, and may be excised from such devices after misalignment has been measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.