Integrated microtube sensing device
US6647778B2 · kind B2 · utility
54Cited by
6References
32Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 20, 2002 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | Jun 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2009/006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensing device that comprises a micromachined tube on a substrate for resonant sensing of mass flow and density of a fluid flowing through the tube. The sensing device further incorporates on the same substrate at least a second micromachined tube configured for sensing another property of the fluid, such as pressure, viscosity and/or temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.