Micro-electro mechanical system
US6649852B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2001 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | Jan 26, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The organic MEMS according to the present invention comprises a polymeric substrate comprising a substrate surface including a first region and a second region. A polymer coating is applied to the first region to provide a coating surface that is spaced apart from the substrate surface. A terminal is disposed on the second region. A metallic trace is affixed to the coating surface such that the metallic trace forms a flexible extension over the second region. The extension has a rest position where the extension is spaced apart from the terminal, and a flexed position where the extension is disposed towards the terminal. An actuator is used to provide an electric field to deflect the extension from the rest position to the flexed position. By changing the spacing between the extension and the terminal, it is possible to change the electrical condition provided by the MEMS.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.