Method and apparatus for fabrication of miniature structures
US6649861B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 4, 2002 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | Jan 18, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0026
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus is provided for fabrication of miniature structures which includes a substrate, a controllable energetic beam, a deposition layer supported on a material carrier element and a control unit operating the apparatus in either of “material removal” and “material transfer” modes of operation. In the “material removal” mode of operation, the control unit displaces the material carrier element away from an interception path with the energetic beam so that the energetic beam impinges in patterned fashion onto the surface of the substrate and disintegrates the surface material of the substrate. In the “material transfer” mode of operation, the control unit displaces the deposition layer to intercept with the energetic beam so that the material contained in the deposition layer is transferred and deposited on the surface of the substrate in a patterned fashion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.