Apparatus for automatically measuring the resistivity of semiconductor boules by using the method of four probes
US6651014B2 · kind B2 · utility
3Cited by
3References
5Claims
0Family size
Assignee
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Key dates
| Filing date | May 3, 2002 |
| Grant date | Nov 18, 2003 |
| Priority date | — |
| Expiry date | May 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2648
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for the automated measurement and recording of the electrical resistivity of a semiconductor boule or ingot using the method of four probes has a four point boule support grid is provided adjacent to the home position of a four tip probe which is equipped with three axis linear mobility, rotational capability, and computer control, to provide automated mapping and testing of an “as grown” or ground semiconductor boule with cropped ends, for obtaining and recording resistivity data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.