Systems and methods of monitoring thin film deposition
US6651488B2 · kind B2 · utility
80Cited by
34References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2002 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Oct 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.