Micromachined silicon tuned counterbalanced accelerometer-gyro with quadrature nulling
US6651500B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2001 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Oct 3, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/097
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated rate and accelerometer sensor includes two counter vibrating tuned accelerometers formed in a single substantially planar silicon body to form the sensing element. The two vibrating accelerometers are interleaved in a manner that places their respective centers of mass in the same line parallel to the direction of the vibration and has the centers of percussion of the two (pendulum) proof masses coincident. A phase insensitive quadrature nulling method is utilized for each of the two vibrating accelerometers. The sensor structure utilizes Pyrex for the top and bottom covers. Metalized electrodes, feedthrus and contact pads are also utilized for the sensing element, instead of interlayer wire bonds.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.